Sometimes the design phase doesn’t meet what happens for decay time during testing. At TES, we’ve developed an expandable fan filter design to solve this issue.
Posts Tagged: Ionization
Using the “Dual Zone” filter for FFU Ionization Since the ionizer in a front end is located right under the filter and in fact the airflow carries the ions to the wafer plane, it is natural to see the ionizer integrated into the Fan Filter Unit (FFU). In typical applications the wafer plane is some 12 or… Read more »