Custom Fan Filter Unit (FFU) Sizing As the leader in custom engineered Fan Filters Units (FFUs), we are often presented with the challenge of fitting a FFU in a restricted height area. As the semiconductor equipment market continues to pack more equipment in less space, the challenge of getting clean air to the key zones… Read more »
Posts Tagged: ffu
When a clean, in-tool environment encounters varying conditions, the ideal amount of hyper-clean air being dumped into the space changes.
As technology continues to improve and units become smaller and smaller, we continue to advance our fan filter design and certain elements of our AMC filtration units. Check out these latest designs for custom AMC fan filter units and retrofits.
Learn about the benefits of dual-LED-lit FFUs with “Lumifilter” technology allowing the switch between white or amber light on the same fan filter unit.
Choosing the Right Fan Curve for Your Fan Filter Unit Electrical engineers know that a fan system will perform differently when different voltage/Hz. electricity is applied. However, it is less well known that the fan curves for popular FFU fans are only available in: 230V 1PH/50 Hz. (applicable for Europe and Singapore) 230 1 PH/60 Hz. (no… Read more »
Using the “Dual Zone” filter for FFU Ionization Since the ionizer in a front end is located right under the filter and in fact the airflow carries the ions to the wafer plane, it is natural to see the ionizer integrated into the Fan Filter Unit (FFU). In typical applications the wafer plane is some 12 or… Read more »
Air Pressure Controls for Fan Filter Units Many versions are available to cover different requirements, and following are the 3 basic groups of APC FFUs. There are many subsets of these 3 basic groups that exist.
Pharmaceutical Grade Clean Room Fan Filters Jim Harris, Owner of TES-CleanAirSystems, presents on the use of Airborne Molecular Contamination (AMC) Filters on Fan Filter units (FFUs).
Custom Fan Filter Units for Biotech Clean Rooms A Fan Filter Unit is an excellent way to meet the need when a small amount of HEPA/ULPA filtered clean space is required. A fan filter unit can be a very plain item like an Envirco-MAC 10 or something more specific in size and specification, which are referred to… Read more »
This video discusses the limitation of air flow uniformiy in a typical HEPA Fan filter Unit. Technical explanations for the limitations are discussed and a solution involving the use of a diffusion membrane is proposed.