Custom Fan Filter Unit (FFU) Sizing As the leader in custom engineered Fan Filters Units (FFUs), we are often presented with the challenge of fitting a FFU in a restricted height area. As the semiconductor equipment market continues to pack more equipment in less space, the challenge of getting clean air to the key zones… Read more »
Posts By: TES Team
Advanced Fan Speed Control Options, Including Automatic Pressure Control
When a clean, in-tool environment encounters varying conditions, the ideal amount of hyper-clean air being dumped into the space changes.
AMC Fan Filter Unit (FFU) Retrofit Kits
As technology continues to improve and units become smaller and smaller, we continue to advance our fan filter design and certain elements of our AMC filtration units. Check out these latest designs for custom AMC fan filter units and retrofits.
Expandable Ions
During the design phase of a clean space it is often unclear if one ion bar or more than one is required to meet the specification. To solve this issue we offer the build in expandability with our “expandable ions” solution. See blog
Dual LED-Lit Fan Filter Units
Learn about the benefits of dual-LED-lit FFUs with “Lumifilter” technology allowing the switch between white or amber light on the same fan filter unit.
Proprietary “Accu-Volume” system now allows for truly accurate fan sizing in FFU application
Choosing the Right Fan Curve for Your Fan Filter Unit Electrical engineers know that a fan system will perform differently when different voltage/Hz. electricity is applied. However, it is less well known that the fan curves for popular FFU fans are only available in: 230V 1PH/50 Hz. (applicable for Europe and Singapore) 230 1 PH/60 Hz. (no… Read more »
Integrating Ionization into Fan Filters With Distance Restriction to the Wafer Plane
Using the “Dual Zone” filter for FFU Ionization Since the ionizer in a front end is located right under the filter and in fact the airflow carries the ions to the wafer plane, it is natural to see the ionizer integrated into the Fan Filter Unit (FFU). In typical applications the wafer plane is some 12 or… Read more »
FFUs to Cover a Large Zone
Air Pressure Controls for Fan Filter Units Many versions are available to cover different requirements, and following are the 3 basic groups of APC FFUs. There are many subsets of these 3 basic groups that exist.
ESTECH 2012 – IEST 59th Annual Technical Meeting
Guest Speaker Presentation at ESTECH 2012 Jim Harris of TES-Clean Air Systems has accepted an invitation to speak at the ESTECH conference Thursday May 3rd on the subjects of applying Airborne Contamination Filters (AMC) and Ionization to Fan Filters on EFEMS and process tools.
Worldwide Semiconductor Revenue Hits Record High of $120.8 Billion
The explosive growth in the semiconductor market is due to a lot of factors. High revenue in the tech sector spurs FFU growth. Learn more in our blog post.