Designing Expandable Ionization Capability in FFUs
One of the issues facing an engineer designing a clean, static free environment, like an EFEM, is how to meet a customer specification for discharge time without having the ability to test the outcome before finalizing the design. If one Aerobar/FFU would allow for a 90% decay time (100V to 100V on a charged plate monitor), then one Aerobar is the right answer. But what about when the design is complete and during system testing it becomes apparent that two bars is required to meet the spec? To address that issue we have designed into our Integrated Ion FFUs the ability to easily and quickly upgrade from one to two Aerobars (or in larger FFUs, from two to three Aerobars).
FFU End View
FFU side view, cut-away