Lighting Today’s Semiconductor Equipment
When a ULPA filtration system, usually in the form of a FFU, is installed the net effect is that you have the cleanest environment that can be achieved. However one of the things that also happens as a side effect of the filter being opaque is that any light that was available is now blocked. The answer to lighting in the Front end/EFEM has taken any number of shapes, but none that are ideal. Fluorescent lights needs to be replaced and run the risk of breakage where the gases in the bulb are released into the hyper clean environment. LEDs are ideal in terms of being very high quality light while giving long life, but they are typically located off to the side or on the back wall so the light castes shadows and often what I have seen as far as packaging of the light itself is not up to snuff as far as what should be in a ISO class 1 or 2 environment.
(Our Answer and Photo Samples Below)
But we have the answer, and it is patent pending.
Working with our filter partner, American Air filter, we now have available a LED light source that is literally perfect for the application. It does not take up any space in the clean space and is ideally located over the robot or aligner or whatever you want it located over. How so? A single piece clear or yellow “U” Channel is actually manufactured with the filter and goes through all the final test procedure for leakage and filter efficiency and etc. Curious how it all would work for you? Give us ring at 510-656-5333 or check it out on the web site.
Photo Samples:
