Particle Contamination Sensors
Lighthouse Worldwide Solutions is
our Strategic Partner for Providing Environmental Monitoring
Equipment to be Integrated into the Clean Air System
LWS Remote Particle Senor Family®
particle count sensor
For
those applications where the end user wishes to have a sensor
with either 0.1 micron, 0.2 micron, 0.3 micron or 0.5 micron maximum sensitivity
when the appropriate LWS remote senor is selected. This sensor uses a
diode laser for long life reliability. One or several sensor may
be employed depending on the budget, the customer’s goals and the
size of the environment being monitored.
0.1 Micron Remote
Particle Sensor (pdf)
0.2 or 0.3 or
0.5 Sensor (pdf)
1 CFM Mini manifold
For those customers who wish to use a manifold to monitor
multiple points in a Mini-environment, front end, or EFEM the “1
CFM Minimanifold” is the most commonly specified item. The 1 CFM
MiniManifold provides the Ability to Monitor 6 places in Your
Mini-Environment or EFEM Simultaneously, at 1 CFM
About the 1 CFM MiniManifold:
The MiniManifold is a process monitor designed to help the tool
owner detect and diagnose conditions in which yield might be
impacted by particulates.
Industry migration towards the 300 mm wafer has made the
mini-environment a key feature in new semiconductor clean rooms. For
similar reasons, both the data storage and pharmaceutical industries
have also moved to positive pressure enclosures designed to fit
tightly around the tool.
Despite the significantly increased level of cleanliness, the
mini-environment still requires monitoring for particles. However,
this new environment has certain distinctive characteristics that
require new monitoring techniques and equipment.
Based on our years of industry leadership in micro contamination
management, Lighthouse Worldwide Solutions has developed and applied
for a patent on the 1 CFM MiniManifold, an entirely new type of
process monitor explicitly for monitoring mini-environments. The
Mini-Net is a process monitor designed to help the tool owner detect
and diagnose conditions in which yield might be impacted by
particulates.
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