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The Standard Unit Features
a 99.9995% @ 0.1 Micron Minimum Efficiency Glass ULPA Filter
A fully tested and certified, silicone free, microfiber
glass ULPA filter with 2” pleat pack depth and 0.68” WC
pressure drop at 100 FPM filter face velocity has a minimum
efficiency of 99.9995% on 0.10 Micron particles. It comes
with an integral flattened metal expanded facescreen, painted
white and located on the downstream side.
AAF
Glass ULPA pressure and efficiency curves (pdf)
Note: One of the most important features of the FFU is the
proper selection of the media for the application (E.G. must
use PTFE for 300 mm applications).
Options
99.99% @ 0.3 Micron HEPA
Filter
For those conscious of initial cost and not requiring
a filter rated at 0.1 micron a 99.99% @ 0.3 micron minimum
efficiency, silicone free, micro fiber
glass HEPA filter with 2” pleat pack can be substituted for the glass
ULPA filter.
PIC
OF HEPA filter media efficiency and pressure drop curves (pdf)
Lower Pressure Drop Filter
For those applications where a lower initial pressure drop, and/or higher CFM
output is desired, pleat pack heights of 3” or 4” can be substituted
for the standard 2”.
PIC
of pressure drop curves for 3” and 4” glass (pdf)
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PTFE Filter/300 mm Applications |
For applications where the FFU will provide clean air to
a 300 mm semiconductor application the Sematech I300I Factory
Guideline Compliance: Factory Maturity
Assessment (FIMA) for 300 mm.
AAF
MEGACEL LIT (pdf)
Sematech's, I300I
Factory Guideline Compliance: Factory Integration Maturity
Assessment (FIMA) for 300 mm Production Equipment (pdf) (full
document is available by request from TES-Clean Air Systems)
No Facescreen on the Filter
| For those applications where the filter
can have nothing below the surface of the filter media,
the filter is provided without a face screen. (We generally
do not recommend this and only conditionally recommend
it when PTFE media is used). |
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Perforsted Stainless Steel Facescreen
| For those applications where the filter
can have nothing below the surface of the filter media,
the filter is provided without a face screen. (We generally
do not recommend this and only conditionally recommend
it when PTFE media is used). |
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Filter Has an Aerosol Test Port
| For those applications requiring an aerosol
leak test a test port can be supplied in the HEPA or
ULPA filter in a center board in the filter. |
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