TES-Clean Air Sytems offers an array of services in the areas of Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA. Please contact us if you require consultation in these areas):

Consulting Service Group
List of Professional Services:

1. E78 compliance auditing 1F) Tool Verification
2. Canary Study 1G) Photolithography contamination
3. ESA Study 1H) Scientific ESD investigation
4. ESD/EMI Analyses 1I) General ESD problem solving
5. Fab Electrostatic Audits

E78 Tool Verification

E78 Tool Verification is preformed to the following specifications:

• SEMI® E78-0998
  • “Static Budget Guide for Capital Equipment”
• Guideline for controlling static charge inside semiconductor tools
  • Recommends limits on static charge levels
  • Encourages OEMs to design in static control)

Understanding and Applying SEMI’s E78 Guide (pdf)

SEMI® E78 Compliance Testing (pdf)

ESA Contamination Study

On a case by case basis we can be contracted to do a study , or series of studies to determine and report the effect of Electrostatic Attraction (ESA) in your process environment