Standard and Custom FFU’s

The Standard Unit Features a 99.9995% @ 0.1 Micron Minimum Efficiency Glass ULPA Filter

A fully tested and certified, silicone free, microfiber glass ULPA filter with 2” pleat pack depth and 0.68” WC pressure drop at 100 FPM filter face velocity has a minimum efficiency of 99.9995% on 0.10 Micron particles. It comes with an integral flattened metal expanded facescreen, painted white and located on the downstream side.

Note: One of the most important features of the FFU is the proper selection of the media for the application (E.G. must use PTFE for 300 mm applications).

Options

99.99% @ 0.3 Micron HEPA Filter
For those conscious of initial cost and not requiring a filter rated at 0.1 micron a 99.99% @ 0.3 micron minimum efficiency, silicone free, micro fiber glass HEPA filter with 2” pleat pack can be substituted for the glass ULPA filter.

Lower Pressure Drop Filter
For those applications where a lower initial pressure drop, and/or higher CFM output is desired, pleat pack heights of 3” or 4” can be substituted for the standard 2”.

300mmarwPTFE Filter/300 mm Applications

For applications where the FFU will provide clean air to a 300 mm semiconductor application the Sematech I300I Factory Guideline Compliance: Factory Maturity Assessment (FIMA) for 300 mm.

Sematech’s, I300I Factory Guideline Compliance: Factory Integration Maturity Assessment (FIMA) for 300 mm Production Equipment (pdf) (full document is available by request from TES-Clean Air Systems)

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No Facescreen on the Filter
For those applications where the filter can have nothing below the surface of the filter media, the filter is provided without a face screen. (We generally do not recommend this and only conditionally recommend it when PTFE media is used).

filtr16Perforsted Stainless Steel Facescreen
For those applications where the filter can have nothing below the surface of the filter media, the filter is provided without a face screen. (We generally do not recommend this and only conditionally recommend it when PTFE media is used).

cntrbrdFilter Has an Aerosol Test Port
For those applications requiring an aerosol leak test a test port can be supplied in the HEPA or ULPA filter in a center board in the filter.